4. Radiant energy
  5. Irradiation of objects or material
  6. Irradiation of semiconductor devices

Tomohide Hamada

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Exposure apparatus

Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate

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Exposure apparatus

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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Multi-beam scanning projection exposure apparatus and method wit

Radiant energy – Photocells; circuits and apparatus – Photocell controls its own optical systems
Patent

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Optical position measuring apparatus

Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system
Patent

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Projection exposure apparatus

Photocopying – Projection printing and copying cameras – Step and repeat
Patent

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Profile ID: LFUS-PAI-P-607816

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