Scanning exposure apparatus

Details Scanning exposure apparatus Scanning exposure apparatus

1994-06-07

1996-07-09

Gellner, M. L.

Photocopying

Projection printing and copying cameras

Step and repeat

355 67, 355 71, 353122, 359585, 359622, G02B 2700

Patent

active

055349706

ABSTRACT:
A projection exposure apparatus for transferring a pattern formed on a mask onto a photosensitive substrate by a scanning exposure method, includes a light source for generating a light beam having a predetermined spatial coherence, an illumination optical system for receiving the light beam from the light source and illuminating a local area on the mask with the light beam, and a device for synchronously moving the mask and the photosensitive substrate so as to transfer the pattern on the mask onto the photosensitive substrate. A direction, corresponding to a higher spatial coherence of the light beam, is made to coincide with the direction of relative scanning an illumination area and the mask in the illumination area.

REFERENCES:
patent: 4619508 (1986-10-01), Shibuya et al.
patent: 4747678 (1988-05-01), Shafer et al.
patent: 4924257 (1990-05-01), Jain
patent: 5048926 (1991-09-01), Tanimoto
patent: 5194893 (1993-03-01), Nishi
patent: 5253110 (1993-10-01), Ichihara et al.
patent: 5307207 (1994-04-01), Ichihara

Affiliated with

Also associated with

Rating

Scanning exposure apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Scanning exposure apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Scanning exposure apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1871156