Scanning exposure apparatus

Details Scanning exposure apparatus Scanning exposure apparatus

2006-05-16

2006-05-16

Kim, Peter B. (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S072000, C318S569000

Reexamination Certificate

active

07046336

ABSTRACT:
A scanning exposure apparatus includes a stage unit which supports and moves a substrate, and a control unit which starts exposing the substrate after a start of a second section in an acceleration section of the stage unit sequentially including a first section in which a jerk is positive, the second section in which a jerk is 0, and a third section in which a jerk is negative.

REFERENCES:
patent: 5347118 (1994-09-01), Iwanaga
patent: 5920398 (1999-07-01), Iwanaga et al.
patent: 6320345 (2001-11-01), Yuan et al.
patent: 2003/0007137 (2003-01-01), Iwanaga
patent: 2003/0048425 (2003-03-01), Iwanaga
patent: 2005/0024610 (2005-02-01), Nishi et al.
patent: 9-223662 (1997-08-01), None

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