Scanning electron microscope with measurement function

Details Scanning electron microscope with measurement function Scanning electron microscope with measurement function

2006-05-30

2006-05-30

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C430S030000, C430S328000, C430S022000, C430S394000, C250S311000, C250S307000, C250S492300

Reexamination Certificate

active

07053371

ABSTRACT:
A scanning electron microscope which efficiently makes measurements for plural measurement items at a time and allows easy entry, confirmation and revision of auto measurement parameters. Parameters for creation of a line profile from an image captured by the scanning electron microscope are entered as auto measurement parameters (AMP) to be used as common conditions for all measurement items. Also, plural combinations of edge detection methods and measurement calculation methods are entered as auto measurement parameters to make measurements for plural items.

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