Scanning electron microscope with color image display

Details Scanning electron microscope with color image display Scanning electron microscope with color image display

1976-07-12

1977-08-09

Smith, Alfred E.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

250310, H01J 3700

Patent

active

040413110

ABSTRACT:
The system includes a scanning electron microscope (SEM) and a color kinescope (CRT). The electron beams of the SEM and the CRT are driven in a synchronized raster. A first signal representative of back-scattered electrons, for example, is fed to a color encoder section, the output of which drives each of the red, green and blue guns of the CRT to generate a uniquely encoded color representation of the information in the first signal. A second signal, which may be derived from the secondary electron image of the sample is used to modulate the brightness of the CRT in accordance with the scanning electron beam. There is thus presented on the CRT a color image of high resolution and information content, and one which is ideally suited to human perception.

REFERENCES:
patent: 3628014 (1971-12-01), Grubic
patent: 3812288 (1974-05-01), Walsh et al.
"Color Display in Electron Probe Microanalysis," Ordonez, Metallography, vol. 4, No. 6, pp. 575-579, (1971).
"Electron Microprobe Analysis Through Colorimetry," DiGiacomo et al., IBM Tech. Disclosure Bulletin, vol. 14, No. 1, pp. 165-166, (June 1961).

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