Scanning electron microscope having a monochromator

Details Scanning electron microscope having a monochromator Scanning electron microscope having a monochromator

2009-10-23

2011-11-29

Souw, Bernard E (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

C250S310000, C250S3960ML

Reexamination Certificate

active

08067733

ABSTRACT:
A scanning electron microscope having a monochromator that can automatically adjust an electron beam entering the monochromator and operating conditions of the monochromator. The scanning electron microscope having a monochromator is equipped with, between an electron source and the monochromator, a first focusing lens for adjusting focusing of the electron beam entering the monochromator and a first astigmatism correcting lens for correcting astigmatism of the electron beam entering the monochromator. The microscope further includes a means of obtaining an image of an electron-beam adjustment sample disposed where the electron beam in the monochromator is focused, and based on the obtained image, driving the first focusing lens and the first astigmatism correcting lens so that the focusing and astigmatism of the electron beam entering the monochromator are adjusted.

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Japanese Office Action issued in Japanese Patent Application No. JP 2006-000764 dated Nov. 2, 2010.

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