Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent
1986-01-17
1988-01-19
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
250251, G01N 2300
Patent
active
047206330
ABSTRACT:
A scanning electron microscope useful for obtaining microscopic data or images of wet specimens is provided with comprises an electron source capable of emitting a beam of electrons; an electron optical vacuum column with means for focussing the beam of electrons; means for scanning the focussed beam of electrons across a specimen; a differentially pumped aperture column attached to the electron optical vacuum column and having at least two walls perpendicular to the sides of the differentially pumped aperture column defining a suitable series of pressure gradients, each wall having an aperture aligned to permit the beam of electrons to pass through said differentially pumped aperture column; a specimen chamber which may be maintained at normal atmospheric pressure; a specimen mount; means of preventing the buildup of negative charge on the surface of the specimen; and a detector and image recording system.
REFERENCES:
patent: 2467224 (1949-04-01), Picard
patent: 2890342 (1959-06-01), Columbe
patent: 4393295 (1983-07-01), Beisswenger et al.
patent: 4528451 (1985-07-01), Petric et al.
patent: 4596928 (1986-06-01), Dantilatos
Anderson Bruce C.
Electro-Scan Corporation
Stark Michael
White John P.
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