Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent
1989-03-30
1990-04-10
Howell, Janice A.
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
250311, H01J 3728
Patent
active
049163159
ABSTRACT:
A scanning electron microscope for observing and measuring a minute pattern of a sample comprising an electron lens for focusing an electron beam from an electron source onto the sample, wherein the electron beam scans on the sample, an inclining means for inclining the sample at an arbitrary angle .alpha., and two secondary electron detectors are disposed at the position which are respectively turned at the same angle .theta. around the central axis of the electron beam from a plane which contains an axis of inclination of the sample and a central axis of the electron beam. As it is possible to measure the length of the minute pattern by detecting the secondary electron having a symmetrical wave-form while observing the minute pattern at the arbitrary angle, high measuring accuracy is attained.
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patent: 4437009 (1984-03-01), Yamazaki
patent: 4670652 (1987-06-01), Ichihashi et al.
patent: 4751384 (1988-06-01), Murakoshi et al.
patent: 4757926 (1988-08-01), Murakoshi et al.
patent: 4818874 (1989-04-01), Ishikawa
Hitachi , Ltd.
Howell Janice A.
Nguyen Kiet T.
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