Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent
1974-09-13
1976-06-01
Newsome, John H.
Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
427273, 2351511, B05D 306
Patent
active
039611027
ABSTRACT:
A method of making optical gratings by the use of a Scanning Electron Microscope wherein (1) a substrate having a thin film of electron resist thereon is exposed in adjacent areas by an electron dosage and the amount of such dosage and the depth of the thin film are selected such that energy deposition in regions between adjacent exposed areas in said electron resist is below the threshold sensitivity of said resist for development, (2) the development time of the resist is made an inverse function of the electron dosage, and/or (3) the period of the grating is controlled by use of a standard scanning format.
REFERENCES:
patent: 3535137 (1970-10-01), Haller et al.
patent: 3679497 (1972-07-01), Handy et al.
patent: 3681103 (1972-08-01), Brown
patent: 3703402 (1972-11-01), Cole
patent: 3775592 (1973-11-01), Ando et al.
patent: 3843875 (1974-10-01), Goodstal et al.
Ballantyne Joseph M.
Rhodes Lawrence Bryce
Tang Chung L.
Turner John J.
Yang Ji Liang
Barnard Ralph R.
Cornwell Research Foundation, Inc.
Laubschor Lawrence E.
Newsome John H.
Wood Theodore C.
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