Scanning electron microscope and system for inspecting...

Details Scanning electron microscope and system for inspecting... Scanning electron microscope and system for inspecting...

2005-11-08

2010-11-16

Vanore, David A (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S306000, C250S307000, C250S311000

Reexamination Certificate

active

07834317

ABSTRACT:
A scanning electron microscope has an electron source for illuminating a primary electron beam on a specimen wafer, an accelerating electrode, a condenser lens, a deflector, an objective lens, a detector for acquiring a digital image by sampling a signal of emissive electrons generated from the specimen wafer, a digitizing means, an image memory for storing, displaying or processing the acquired digital image, an input/output unit, an image creation unit and an image processor. The scanning electron microscope is provided with a sampling unit for sampling the emissive electron signal at intervals each smaller than the pixel size of the digital image to be stored, displayed or processed and an image creation process means for enlarging the pixel size on the basis of the sampled emissive electron signal to create a digital image.

REFERENCES:
patent: 6107637 (2000-08-01), Watanabe et al.
patent: 09-304023 (1997-11-01), None
patent: 2000-123771 (2000-04-01), None
patent: 2002-281514 (2002-09-01), None
patent: 2003-324693 (2003-11-01), None
patent: 2003-331769 (2003-11-01), None

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