Scanning electron microscope and speciman observation method the

Details Scanning electron microscope and speciman observation method the Scanning electron microscope and speciman observation method the

1995-12-28

1997-09-23

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250307, H01J 3728

Patent

active

056707827

ABSTRACT:
An axially symmetric electrode to allow passage of the primary electron beam is installed on the electron beam path inside the magnetic pole of the objective lens so that the primary electron beam passing through the objective lens has a higher energy than the final acceleration voltage. The specimen stage has a sensor to detect the angle of specimen inclination, and the voltage applied to the electrode is decreased or is reduced to zero by a control means if the angle of specimen inclination is too wide.

REFERENCES:
patent: 4713548 (1987-12-01), Feuerbaum et al.
patent: 4803358 (1989-02-01), Kato et al.
patent: 5387793 (1995-02-01), Sato et al.
patent: 5424541 (1995-06-01), Todokoro et al.

Affiliated with

Also associated with

Rating

Scanning electron microscope and speciman observation method the does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Scanning electron microscope and speciman observation method the, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Scanning electron microscope and speciman observation method the will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1939462