Scanning electron microscope and method for dimension measuring

Details Scanning electron microscope and method for dimension measuring Scanning electron microscope and method for dimension measuring

1997-11-26

1999-10-19

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250307, H01J 3726

Patent

active

059693576

ABSTRACT:
An electron beam which can transmit through part of a specimen and can reach a portion not exposing to the electron beam is irradiated and a scanning image is obtained on the basis of a signal secondarily generated from a portion irradiated with the electron beam. Dimension-measuring start and end points are set on the scanning image and a dimension therebetween is measured. A cubic model is assumed, the cubic model is modified so as to match the scanning image, and dimension measurement is carried out on the basis of a modified cubic model.

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