Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent
1995-02-10
1997-01-14
Berman, Jack I.
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
250307, H01J 3726
Patent
active
055942458
ABSTRACT:
An electron beam, which can transmit through part of a specimen and can reach a portion that is not exposed to the electron beam, is irradiated, and a scanning image is obtained on the basis of a signal secondarily generated from a portion irradiated with the electron beam. Dimension-measuring start and end points are set on the scanning image and a dimension therebetween is measured. A three-dimensional model is assumed, the three-dimensional model is modified so as to match the scanning image, and dimension measurement is carried out on the basis of a modified three-dimensional model.
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Kure Tokuo
Kuroda Katsuhiro
Mizuno Fumio
Ninomiya Ken
Otaka Tadashi
Berman Jack I.
Hitachi , Ltd.
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