Scanning electron microscope and method for detecting an...

Details Scanning electron microscope and method for detecting an... Scanning electron microscope and method for detecting an...

2005-12-29

2008-10-07

Berman, Jack I. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S306000, C250S307000, C250S311000, C250S442110

Reexamination Certificate

active

07432503

ABSTRACT:
In the present invention, in order to realize both a reduction of an image detecting time and high quality image detection in a scanning electron microscope for measurement, inspection, defect review, or the like of semiconductor wafers, a low-magnification image is taken by using a large beam current; a high-magnification image is taken by using a small beam current; control amounts for correcting a change in luminance, a focus deviation, misalignment, and visual field misalignment of taken images, which are generated due to a variation of a beam current are saved in advance in a memory of an overall control system; and these amounts are corrected every time the beam current is switched, thereby making it possible to take the images without any adjustment operation after switching the currents.

REFERENCES:
patent: 4864131 (1989-09-01), Rich et al.
patent: 4933565 (1990-06-01), Yamaguchi et al.
patent: 5063293 (1991-11-01), Rich et al.
patent: 6476389 (2002-11-01), Konakawa et al.
patent: 6992287 (2006-01-01), Sullivan
patent: 2002/0142496 (2002-10-01), Nakasuji et al.
patent: 2003/0205678 (2003-11-01), Notte
patent: 2004/0075051 (2004-04-01), Sullivan
patent: 2005/0098724 (2005-05-01), Sullivan
patent: 2003-016983 (2003-01-01), None

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