Scanning electron microscope and method for controlling a scanni

Details Scanning electron microscope and method for controlling a scanni Scanning electron microscope and method for controlling a scanni

1994-09-26

1995-06-13

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250307, H01J 3709

Patent

active

054245419

ABSTRACT:
A scanning electron microscope is provided with a channel cylinder between a sample and an electron source. The channel cylinder generates a deceleration electrical field to decelerate an electron beam emitted from the electron source. The channel cylinder has a portion having an electron source side and sample side. A detector is provided on the electron source side and sample channel cylinder portion. The detector detects the secondary signal emitted from the sample, so that a scan image is obtained with a high spatial resolution.

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patent: 5146090 (1992-09-01), Plies

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