Scanning electron microscope and method and production of semi-c

Details Scanning electron microscope and method and production of semi-c Scanning electron microscope and method and production of semi-c

1991-10-09

1993-04-13

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250306, 2504922, H01J 3726

Patent

active

052025640

ABSTRACT:
An SEM can inspect a groove or hole in the surface of a specimen by irradiating the specimen with a high energy electron beam. The SEM is used in the manufacturing process of a semiconductor device to observe the configuration of the bottom of a deep hole.

REFERENCES:
patent: Re27005 (1970-12-01), Wingfield et al.
patent: 3614311 (1971-10-01), Fijiyasu et al.
patent: 3714424 (1973-01-01), Weber
patent: 4426577 (1984-01-01), Koike et al.
patent: 4658137 (1987-04-01), Garth et al.
patent: 5001350 (1991-03-01), Ohi et al.

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