Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Reexamination Certificate
2007-09-24
2008-09-02
Wells, Nikita (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron microscope type
C250S252100
Reexamination Certificate
active
07420168
ABSTRACT:
A calibration standard specimen is provided to have formed therein calibrating patterns of a lattice shape discontinuously arrayed, and particular alignment patterns respectively disposed near the calibrating patterns so that the positioning of the specimen can be made to match the calibrating patterns to the measurement points.
REFERENCES:
patent: 6919577 (2005-07-01), Watanabe et al.
patent: 7078691 (2006-07-01), Nakayama
patent: 7329889 (2008-02-01), Watanabe et al.
patent: 2005/0184234 (2005-08-01), Nakayama
patent: 2006/0289756 (2006-12-01), Nakayama
patent: 7-71947 (1995-03-01), None
patent: 08-31363 (1996-02-01), None
patent: 2003-279321 (2003-10-01), None
Kawada Hiroki
Mizuno Takeshi
Hitachi High-Technologies Corporation
McDermott Will & Emery LLP
Smith Johnnie L
Wells Nikita
LandOfFree
Scanning electron microscope and CD measurement calibration... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Scanning electron microscope and CD measurement calibration..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Scanning electron microscope and CD measurement calibration... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3989067