Scanning electron microscope

Details Scanning electron microscope Scanning electron microscope

2007-01-19

2009-12-29

Vanore, David A (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

C250S310000, C250S307000, C250S306000, C250S397000, C250S492100, C850S008000, C850S009000, C850S062000

Reexamination Certificate

active

07638767

ABSTRACT:
There is provided an electron microscope which can clearly detect a microscopic unevenness in a sample. According to a scanning electron microscope, when luminance signals from one pair of backscattered electron detectors are given by L and R, and when a luminance signal from a scattered electron detector is given by S, an adjustment value Lc of L and an adjustment value Rc of R are calculated by using primary homogeneous expressions of L, R, and S.

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