Scanning electron microscope

Details Scanning electron microscope Scanning electron microscope

1989-07-18

1991-01-08

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250309, 250396R, 250396ML, H01J 2970

Patent

active

049838326

ABSTRACT:
In a scanning electron microscope scanning a specimen by an electron beam, the electron beam is two-dimensionally deflected so that a deflection fulcrum for the electron beam is located on the principal plane of an objective lens. Further, in order that the electron beam is incident on the specimen at a predetermined angle of incidence, the electron beam is deflected in a relation in which the object point of the objective lens provides another deflection fulcrum. The angle of incidence of the electron beam incident on the specimen is changed over between +.theta. and -.theta., thereby providing a pair of stereoscopic scanned images of the specimen.

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patent: 4714833 (1987-12-01), Rose et al.
JP-58-147948 A, Electroptic System for Scanning Electron Microscope or the like 09-02-1983, EIJI Watanabe.

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