Scanning electron microscope

Details Scanning electron microscope Scanning electron microscope

2007-12-11

2007-12-11

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S311000, C250S306000, C250S3960ML, C250S492100, C250S492200

Reexamination Certificate

active

11211650

ABSTRACT:
In a scanning electron microscope having the function of observing an attentional object on a specimen, an error in an in-focus position can be corrected at high speeds. When moving the field of view to an object to be observed on a specimen on which an electron beam is scanned, an error between an in-focus position indicated by a mechanism for measuring a height of surface of the specimen and an actual in-focus position is corrected on the basis of information concerning points which are among a plurality of measured points and are adjacent to the target observing point.

REFERENCES:
patent: 6333510 (2001-12-01), Watanabe et al.
patent: 6657221 (2003-12-01), Nakagaki et al.
patent: 2005/0173633 (2005-08-01), Tanaka et al.
patent: 2005/0236569 (2005-10-01), Yamaguchi et al.
patent: 5-3013 (1993-01-01), None
patent: 11-297253 (1999-10-01), None
patent: 2002-310962 (2002-10-01), None

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