Scanning electron microscope

Details Scanning electron microscope Scanning electron microscope

2007-12-11

2007-12-11

Toatley, Jr., Gregory J. (Department: 2877)

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

C250S207000, C250S310000, C356S237100

Reexamination Certificate

active

11103654

ABSTRACT:
This SEM has a capability of preventing shift of a view field of the foreign matters at a stage where no sufficient correction is carried out when obtaining the SEM coordinate values used for transforming the coordinate values of the foreign matters on the sample sent from another device into the SEM coordinate values. The SEM selects the foreign matters closer to the center of the sample at first and then the foreign matters spirally from the center of the sample to the outer periphery.

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