Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Patent
1993-04-26
1994-12-27
Berman, Jack I.
Radiant energy
Inspection of solids or liquids by charged particles
Electron microscope type
250396R, 250396ML, H01J 3726
Patent
active
053767926
ABSTRACT:
An improved scanning electron microscope is disclosed which includes a compact, replaceable electron beam emitter assembly and concentric liner tubes. The concentric liner tubes extend through a central portion of electromagnetic lenses for forming an evacuated path for the electron beam. An outer sealing jacket is provided for forming a vacuum seal with the column assembly sufficient to maintain a vacuum within the outer sealing jacket. A conductive inner liner tube positioned within the outer sealing jacket is adapted to have the electron beam pass therethrough. The inner liner tube provides supports for spray baffles and/or beam shaping orifices. The improved electron beam emitter assembly within the gun assembly includes a filament clamped between a front plate and a back plate by clamping screws. The clamping screws additionally hold an adjustable grid against the front plate.
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Reference-BS343 Minisem, Mar. 7, 1991.
Schamber Frederick H.
Turocy Raymond E.
Berman Jack I.
RJ Lee Group, Inc.
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