Scanning electron microscope

Details Scanning electron microscope Scanning electron microscope

2007-11-13

2007-11-13

Berman, Jack I. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S307000, C250S311000, C250S3960ML

Reexamination Certificate

active

11155014

ABSTRACT:
In a scanning electron microscope, an emitted primary electron beam is diverted by an angle of at least about 45 degrees prior to incidence with a specimen. The beam may be bent by a magnetic separator. The separator may also serve to deflect secondary electron and back scattered electrons. As the angle of emissions and reflections from the specimen is close to the angle of incidence, bending the primary electron beam prior to incidence, allows the electron source to be located so as not to obstruct the travel of emissions and reflections to suitable detectors.

REFERENCES:
patent: 6774646 (2004-08-01), Han et al.
patent: 6933501 (2005-08-01), Kaji et al.
patent: 7075075 (2006-07-01), Adamec et al.
John T.L. Thong, “Electron Beam Testing Technology,” New York, Plenum, 1998.
L. Reimer, “Scanning Electron Microscopy, Physics of Image Formation and Microanalysis, 2nd edition,” Chapter 5: Electron Detectors and Spectrometeres, pp. 171-204, 1998.
A. Khursheed, “Aberration Characteristics of Immersion Lenses for LVSEM,” Ultramicroscopy, 93, pp. 331-338, 2002.
V.N.E. Robinson, “An Annular Toroidal Backscattered Electron Energy Analyser for use in Scanning Electron Microscope,” Scanning, vol. 18, pp. 556-561, 1996.
A. Khursheed, “Recent Developments in Scanning Electron Microscope Design,” Advances in Imaging and Electron Physics, vol. 115, edited by P.W. Hawkes, San Diego: Academic Pres.
J.E. Barth and P. Kruit, “Addition of Different Contributions to the Charged Particle Probe Size,” Optik, vol. 101(3), pp. 101-109, 1996.
Tromp, R.M., Mankos, M., Reutr, M.C., Ellis, A.W. and Copel, M., “A New Low Energy Electron Microscope,” Surface Review and Letters, vol. 5, No. 6 pp. 1189-1197, 1998.
L. Reimer, “Transmission Electron Microscopy, Physics of Image Formation and Microanalysis, 4th Edition,” Chapter 4.6: Electron Spectrometers and Filter Lenses, pp. 118-120, 1997.
H.C. Kan, T. Dukop and R.J. Phaneuf, J.Vac Sci Technol., B20 (2002) 2519.
Khursheed, A., Yan, Z., Karupiah, N., “Permanent Magnet Objective Lenses for Multi-Column Electron Beam System,” Rev. Sci. Instrum., 72(4), pp. 2106-2109.
Khursheed, A. and Osterberg, M., A Spectroscopic Scanning Electron Microscope Design, Scanning vol. 26, (2004), pp. 296-306.

Affiliated with

Also associated with

Rating

Scanning electron microscope does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Scanning electron microscope, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Scanning electron microscope will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3868936