Scanning electron microscope

Details Scanning electron microscope Scanning electron microscope

2006-12-26

2006-12-26

Vanore, David A. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

Reexamination Certificate

active

07154089

ABSTRACT:
A scanning electron microscope in which the secondary electrons generated from a specimen are efficiently caught by a secondary electron detector by correcting and controlling the trajectory of the secondary electrons is disclosed. A first auxiliary electrode impressed with a negative potential of several to several tens of volts is arranged in the vicinity of a radiation hole of the primary electron beam under an objective lens, and a second auxiliary electrode impressed with a positive voltage is arranged on the side of the first auxiliary electrode nearer to the secondary electron detector thereby to correct and control the trajectory of the secondary electrons. Further, a third auxiliary electrode for assisting in catching the secondary electrons generated from the specimen is arranged on the front surface of the secondary electron detector.

REFERENCES:
patent: 4897545 (1990-01-01), Danilatos
patent: 6512228 (2003-01-01), Todokoro et al.
patent: 6-103951 (1994-04-01), None
patent: 9-147782 (1997-08-01), None

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