Scanning electron microscope

Details Scanning electron microscope Scanning electron microscope

2006-06-06

2006-06-06

Nguyen, Kiet T. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

C250S310000

Reexamination Certificate

active

07057184

ABSTRACT:
The invention provides a liquid injection system (12) for an environmental scanning electron microscope. The liquid injection system comprises a liquid firing device (18) for firing a liquid and a heat transfer system (17, 22, 24). The heat transfer system functions to maintain the liquid below its boiling point at an operating pressure within the specimen chamber of the environmental scanning electron microscope. The invention also provides an environmental scanning electron microscope incorporating a liquid injection system according to the present invention. The invention provides a simple and robust system for enabling investigation of the liquid injection system within an environmental or variable pressure scanning electron microscope.

REFERENCES:
patent: 4705949 (1987-11-01), Grimes et al.
patent: 5097134 (1992-03-01), Kimoto et al.
patent: 5147823 (1992-09-01), Ishibashi et al.
patent: 6025592 (2000-02-01), Knowles et al.
Patent Abstracts of Japan, Title; Environment Control Type Scanning-Type Electronic Microcope, applicant: Nikon, Inventor, Koga Yasunori, Application date: Feb. 27, 1997, Aplication No. 09043247, Publication No.: 10241620, Publication date: Nov. 9, 1998.

Affiliated with

Also associated with

Rating

Scanning electron microscope does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Scanning electron microscope, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Scanning electron microscope will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3652699