Scanning electron microscope

Details Scanning electron microscope Scanning electron microscope

1997-07-09

1998-11-03

Nguyen, Kiet T.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

H01J 37244

Patent

active

058312650

ABSTRACT:
A scanning electron microscope equipped with a simple structure that permits the operator to align the electron beam easily even if the accelerating voltage, the working distance, or the condenser lens current varies. This structure has a control circuit supplied with a signal corresponding to the accelerating voltage from an accelerating voltage source and a signal corresponding to the working distance. In response to these two signals, the control circuit reads a given alignment signal from a data storage device and sends it to an adder circuit. The output signal from the adder circuit is supplied to alignment coils via a switch, thus aligning the electron beam along the optical axis.

REFERENCES:
patent: 5627373 (1997-05-01), Keese

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