Scanning electron microscope

Details Scanning electron microscope Scanning electron microscope

2005-02-22

2005-02-22

Lee, John R. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S306000, C250S307000, C250S311000, C250S492300

Reexamination Certificate

active

06858845

ABSTRACT:
A scanning electron microscope has an electron gun for producing an electron beam, a specimen holder holding the specimen, an objective lens for sharply focusing the beam onto the specimen, and a power supply for applying a negative voltage to the specimen. A shielding plate made of a conductive material and having at least one hole for limiting the region of the specimen surface illuminated by the beam is mounted on the holder. A voltage almost equal to the voltage applied to the specimen is applied to the shielding plate.

REFERENCES:
patent: 5504340 (1996-04-01), Mizumura et al.
patent: 20040183014 (2004-09-01), Kagawa

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