Scanning electron microscope

Details Scanning electron microscope Scanning electron microscope

2005-05-17

2005-05-17

Nguyen, Kiet T. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S3960ML

Reexamination Certificate

active

06894277

ABSTRACT:
A scanning electron microscope in the present invention includes an electron source1to radiate an electron beam, an objective lens system9to focus the radiated electron beam on a sample10, scanning systems5, 8to scan the focused electron beam on the sample, secondary electron detection systems3,4to detect secondary electrons emitted from the sample10, and a secondary electron image displaying system13to display a secondary electron image of the sample10with a secondary electron detection signal from the secondary electron detection system.The objective lens9is composed of first and second objective lenses11, 12. The first objective lens11is mainly excited when using in a wide visual field mode and the second objective lens12is mainly excited when using in a high resolution mode.

REFERENCES:
patent: 3937959 (1976-02-01), Namae
patent: 6642520 (2003-11-01), Kimura et al.
patent: 6717144 (2004-04-01), Kimura et al.

Affiliated with

Also associated with

Rating

Scanning electron microscope does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Scanning electron microscope, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Scanning electron microscope will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3421974