Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate
2005-04-26
2005-04-26
Berman, Jack I. (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
Reexamination Certificate
active
06885001
ABSTRACT:
The present invention is intended to prevent the deterioration of resolution due to increase in off-axis aberration resulting from the deviation of a primary electron bean from the optical axis of a scanning electron microscope. A scanning electron microscope is provided with an image shifting deflector system including two deflectors disposed respectively at upper and lower stages. The deflector disposed at the lower stage is a multipole electrostatic deflecting electrode and is disposed in an objective. Even if the distance of image shifting is great, an image of a high resolution can be formed and dimensions can be measured in a high accuracy. The SEM is able to achieving precision inspection at a high throughput when applied to inspection in semiconductor device fabricating processes that process a wafer having a large area and provided with very minute circuit elements.
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Ezumi Makoto
Ose Yoichi
Sato Mitsugu
Todokoro Hideo
Berman Jack I.
Hitachi , Ltd.
McDermott Will & Emery LLP
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