Scanning electron microscope

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type

Reexamination Certificate

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Details

C250S442110

Reexamination Certificate

active

06897445

ABSTRACT:
In order to provide a full-automatic scanning electron microscope which carries out investigation jobs full-automatically from fine adjustment to reviewing, the scanning electron microscope of the present invention has a function of calculating the accuracy of correction after correction of coordinates and displaying it with vectors39, a function of automatically determining a searching magnification for automatic object detection from the obtained information after correction of coordinates, and a function of calculating the frequency of occurrence of objects or defects and a time required for measurement from the searching magnification and conditions of measurement.

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patent: 5905650 (1999-05-01), Tsutsui et al.
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patent: 6404911 (2002-06-01), Ishihara et al.
patent: 6535781 (2003-03-01), Tsutsumi
patent: 09-139406 (1997-05-01), None
patent: 10-267993 (1998-10-01), None
patent: 11-167893 (1999-06-01), None

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