Scanning electron microscope

Details Scanning electron microscope Scanning electron microscope

1980-06-02

1982-05-18

Dixon, Harold A.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

250310, G01N 2300

Patent

active

043307078

ABSTRACT:
A scanning electron microscope, comprises an electron gun, an electron-optical column which comprises an anode for accelerating the electrons, a specimen holder for accommodating and positioning the specimen to be examined being arranged underneath said column, and also a detector for detecting the electrons emerging from the specimen. The detector is connected to a display apparatus for the display of an image of the specimen by way of, for example, detected electrons. Between the electron-optical column and the specimen holder there is arranged a brake electrode. An adjustable voltage which reduces the velocity of the electrons emerging from the electron-optical column can be applied between the brake electrode and the anode.

REFERENCES:
patent: 3736422 (1973-05-01), Weber et al.
patent: 3760180 (1972-10-01), Weber
patent: 3792263 (1974-02-01), Hashimoto et al.

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