Scanning electron microscope

Details Scanning electron microscope Scanning electron microscope

1994-05-23

1995-09-05

Dzierzynski, Paul M.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250396ML, 250397, H01J 3709

Patent

active

054480647

ABSTRACT:
A device for reducing the magnetic field, leaked from an electromagnetic lens, in the sample position of a scanning electron microscope, a sample is mounted on a sample cassette which is made of a material having high magnetic permeability, and a head portion of an electron optical system which is made of a material having high magnetic permeability is arranged on the sample side. A window for passing a probe beam therethrough is provided in a wall surface of the electron optical system. Both the sample cassette and the electron optical system head portion surround the sample to constitute a magnetic shield.

REFERENCES:
patent: 5185530 (1993-02-01), Norioka et al.
Japanese Journal of Applied Physics vol. 22, No. 8, Aug. (1983) pp. 1332-1334.

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