Scanning electron microscope

Details Scanning electron microscope Scanning electron microscope

1998-04-17

1999-08-17

Westin, Edward P.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

H01J 3728

Patent

active

059397209

ABSTRACT:
A scanning electron microscope is provided. The scanning electron microscope can efficiently detect secondary electrons from a sample and reflected electrons irrespective of magnitudes of an acceleration voltage and a deceleration voltage using the retarding method. The scanning electron microscope comprises a sample holder 17; an electron beam source 1 for emitting an electron beam 19; scanning means 26, 27 for scanning the electron beam on the sample; an objective lens 3; a deceleration electric field generating means 20 for generating a deceleration electric field to decelerate the electron beam in the space above the sample 9; and detectors 150, 151 for detecting a secondary signal composed of at least one of secondary electrons 16 and reflected electrons 15 generated from the sample 9 by irradiation of the electron beam. The first detector 150 is arranged at a position in which the secondary signals 15, 16 can collide with the first detector to detect the secondary signals 15, 16 and to further emit secondary electrons 16b by collision of the secondary signals 15, 16. The second detector 151 detects the secondary electrons 16b emitted from the first detector 150.

REFERENCES:
Ultramicroscopy 41 (1992), p. 402 "Some Approaches to Low-Voltage Scanning Electron Microscopy".
SPIE--The International Society for Optical Engineering, vol. 2725 (1996), pp. 105-113, "Metrology Inspection, and Process Control for Microlithography X".

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