Scanning electron microscope

Details Scanning electron microscope Scanning electron microscope

1995-10-06

1997-07-08

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

25044211, H01J 3728

Patent

active

056464037

ABSTRACT:
A stage on which a sample is placed is driven through feed screws rotated by pulse motors which are controlled by a micro-step drive control method. Backlash quantities and feed screw pitch errors have previously been obtained and stored in a memory, and when the stage is to be driven, a stage controller corrects the backlash and pitch errors.

REFERENCES:
patent: 3852719 (1974-12-01), Nishumura et al.
patent: 4447731 (1984-05-01), Kuni et al.
patent: 4678919 (1987-07-01), Sugishima et al.
patent: 4687931 (1987-08-01), Fukuhara et al.
patent: 4827127 (1989-05-01), Todokoro

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