Scanning electron microscope

Details Scanning electron microscope Scanning electron microscope

1974-07-25

1978-01-10

Church, Craig E.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

250310, H01J 3726

Patent

active

040681238

ABSTRACT:
A scanning electron microscope having a plurality of annular shaped electron detectors. The ratio of two detector output signals is compared with some constant value indicative of a component of the specimen. On the basis of the comparison the output signal of one detector is passed or not passed to an image display means to provide an image indicative of said component.

REFERENCES:
patent: 3473023 (1969-10-01), Bloch
patent: 3619607 (1971-11-01), Ichinokawa
patent: 3626184 (1971-12-01), Crewe
patent: 3714425 (1973-01-01), Someya
patent: 3812288 (1974-05-01), Walsh

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