Scanning electron microscope

Details Scanning electron microscope Scanning electron microscope

1995-03-23

1996-03-19

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250397, H01J 37256, H01J 37244

Patent

active

055005284

ABSTRACT:
A sample in a sample chamber is irradiated for scanning with an electron beam emitted through a pressure limiting aperture. Secondary electrons reflected from the sample are gas amplified by gas in the sample chamber. A member defining limiting aperture serves also as an electrode, and another electrode is provided around the member. The member can move along a passage for the electron beam emitted from an electron gun by means of, for example a motor, a pinion spindle, a pinion, a rack, and a connecting member. The pressure limiting aperture is positioned close to the sample when a contact hole is observed and is positioned away from the specimen when the surface of the sample is observed.

REFERENCES:
patent: 4596928 (1986-06-01), Dantilatos
patent: 4720633 (1988-01-01), Nelson
patent: 4785182 (1988-11-01), Mancuso et al.
patent: 4823006 (1989-04-01), Danilatos et al.
patent: 4897545 (1990-01-01), Danilatos
patent: 5250808 (1993-10-01), Danilatos et al.
patent: 5396067 (1995-03-01), Suzuki et al.
patent: 5412211 (1995-05-01), Knowles

Affiliated with

Also associated with

Rating

Scanning electron microscope does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Scanning electron microscope, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Scanning electron microscope will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1960133