Scanning electron microscope

Details Scanning electron microscope Scanning electron microscope

1998-04-24

2000-02-15

Westin, Edward P.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250311, H01J 3728, H01J 37244

Patent

active

060255935

ABSTRACT:
A scanning electron microscope is provided which can achieve an improved detection efficiency in the detection of secondary electrons without affecting an electron beam for irradiating a specimen, and which is suitable for detecting specific secondary electrons in a specific energy range. Secondary electrons 14 generated by irradiation of specimen 8 with electron beam 4 are decelerated by a decelerating electrical field formed by a pair of electrodes 10, 11 of field generation unit 28. Thereby, a portion of secondary electrons having a low energy is repelled. Other secondary electrons not having been repelled are deflected by a deflecting electrical field formed between the pair of electrodes as well as by a deflecting magnetic field which is orthogonal to the deflecting electrical field, to be detected by secondary electron detector 12. However, a portion of secondary electrons having a higher energy which could not have been deflected by the deflecting electrical field and deflecting magnetic field cannot be detected by secondary electron detector 12.

REFERENCES:
patent: 4300045 (1981-11-01), Ibach et al.
patent: 4658136 (1987-04-01), Ohtaka et al.
patent: 4893009 (1990-01-01), Kuroda
patent: 5387793 (1995-02-01), Sato et al.
patent: 5594245 (1997-01-01), Todokoro et al.
patent: 5872358 (1999-02-01), Todokoro et al.

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