Scanning electron microscope

Details Scanning electron microscope Scanning electron microscope

1996-11-14

1998-07-14

Anderson, Bruce

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

25044211, 250398, H01J 3720

Patent

active

057808538

ABSTRACT:
A stage on which a sample is placed is driven through feed screws rotated by pulse motors which are controlled by a micro-step drive control method. Backlash quantities and feed screw pitch errors have previously been obtained and stored in a memory, and when the stage is to be driven, a stage controller corrects the backlash and pitch errors.

REFERENCES:
patent: 3816651 (1974-06-01), Gardner
patent: 4687931 (1987-08-01), Fukuhara et al.
patent: 5610406 (1997-03-01), Kai et al.

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