Scanning electron microscope

Details Scanning electron microscope Scanning electron microscope

1985-02-15

1987-04-14

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250306, G01N 2300

Patent

active

046581383

ABSTRACT:
The present invention relates to a scanning electron mircoscope suitable for observing the magnetization condition of the portion of a magnetic material which is in the vicinity of the surface thereof. This microscope consists of means for emitting a fine electron beam to the upper surface of a sample, means for scanning the sample surface with the fine electron beam, means for collecting secondary electrons from the sample, means for detecting a spin polarization vector of the collected secondary electrons, means for converting a component, which is in an arbitrary direction in the surface of the sample, and/or a component, which is in the normal direction of the surface of the sample, of the detected polarization vector into a picture signal which is representative of an image obtained through the scanning electron microscope, and means for indicating the picture image on a display.

REFERENCES:
patent: 3329813 (1967-07-01), Hashimoto
patent: 4153844 (1979-05-01), Kirschmer
patent: 4455486 (1984-06-01), Rau

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