Scanning electron microscope

Details Scanning electron microscope Scanning electron microscope

1996-08-07

1997-10-14

Nguyen, Kiet T.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250397, H01J 37244

Patent

active

056775318

ABSTRACT:
A scanning electron microscope is provided for forming an image of a specimen based upon a secondary electron signal corresponding to secondary electrons detected by a secondary electron detecting electrode. The secondary electrons are emitted from the specimen when irradiated with a beam of electrons, and multiplied in a secondary electron multiplication region having a controlled gaseous atmosphere at a predetermined pressure. The scanning electron microscope further includes a multiplication environment detecting section that detects a physical quantity related to a degree of multiplication of the secondary electrons, and a specimen image adjusting section that adjusts an appearance of the formed image of the specimen based upon the physical quantity detected by the multiplication environment detecting section.

REFERENCES:
patent: 4897545 (1990-01-01), Danilatos
patent: 5396067 (1995-03-01), Suzuki et al.
patent: 5466936 (1995-11-01), Kohama et al.

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