Scanning electron microscope

Details Scanning electron microscope Scanning electron microscope

1997-07-24

1998-11-10

Nguyen, Kiet T.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

H01J 3726

Patent

active

058347747

ABSTRACT:
There is disclosed a scanning electron microscope for producing images at different magnifications in such a way that these images can be easily compared. This microscope has a control unit that is set at two magnifications. These two magnifications are stored in their respective magnification memories. A first frame used for a comparison of the magnifications is displayed in a size F.sub.1 on a first CRT. A second frame used for a comparison of the magnifications is displayed in a size F.sub.2 on a second CRT. A magnification comparator finds these sizes F.sub.1 and F.sub.2 from the two magnifications and from the sizes of the viewing screens of the two CRTs. Signals indicating the sizes F.sub.1 and F.sub.2 are supplied to a magnification comparison frame display device, which produces frame signals to adders, where the frame signals are superimposed on the image signals. A frame indicating the scope of the image displayed on the second CRT is displayed on the first CRT. A frame indicating the scope of the image displayed on the first CRT is displayed on the second CRT.

REFERENCES:
patent: 4020343 (1977-04-01), Shimaya et al.
patent: 4071759 (1978-01-01), Namae
patent: 4439681 (1984-03-01), Norioka et al.
patent: 5412209 (1995-05-01), Otaka et al.

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