Scanning electron microscope

Details Scanning electron microscope Scanning electron microscope

1987-03-16

1988-12-06

Fields, Carolyn E.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

2504431, 250305, G01N 2322

Patent

active

047897813

ABSTRACT:
A scanning electron microscope includes a heater coil which is arranged around a sample, an electron beam which is radiated when the sample is heated, and a secondary electron generated from the sample which is attracted to a photo multiplier. In this electron microscope, a shield plate is provided having an extracting hole for extracting the secondary electron outside of the heat coil in such a manner that the extracting hole is aligned with a light axis of the electron beam. The shield plate is connected to a power source which supplies a variable voltage so that a desired voltage can be applied to the shield plate so as to shield thermal electrons.

REFERENCES:
patent: 4464571 (1984-08-01), Plies
patent: 4683376 (1987-07-01), Feuerbaum
Instron Catalog by Instro-Japan Co., Ltd., JC-D-21(a)/Apr., 1982.

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