Scanning electron microscope

Details Scanning electron microscope Scanning electron microscope

1992-03-02

1993-01-26

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250397, H01J 3728

Patent

active

051824540

ABSTRACT:
A scanning electron microscope capable of producing an accurate topographical image of a specimen surface irrespective of the elements of the specimen or if the dosage of electron beam varies. The instrument has two detectors arranged in such a way as to detect electron beams reflected from the specimen in two directions which are arranged symmetrically with respect to the normal line to the specimen surface. A subtractor circuit produces the difference between the output signals from the detectors. An adder circuit produces the sum of the output signals from the detectors. A corrective circuit divides the output signal from the subtractor circuit by the output signal from the adder circuit. The output signal from the corrective circuit is integrated by an integrator.

REFERENCES:
patent: 3329813 (1967-07-01), Hashimoto
patent: 3351755 (1967-11-01), Hasler
patent: 4670652 (1987-06-01), Ichihashi et al.
patent: 4751384 (1988-06-01), Murakoshi et al.
patent: 4803357 (1989-02-01), Brust
patent: 5001344 (1991-03-01), Kato et al.
patent: 5097204 (1992-03-01), Yoshizawa et al.

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