Scanning electron microscope

Details Scanning electron microscope Scanning electron microscope

1998-08-12

2000-03-28

Nguyen, Kiet T.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

H01J 37244

Patent

active

060434910

ABSTRACT:
A scanning electron microscope in the present invention, by employing a retarding method and suppressing interferences between an electron beam and secondary electrons or back scattered electrons, makes it possible to obtain a clearer SEM image with a higher resolution. In the scanning electron microscope in the present invention, a shield electrode 117 is provided for shielding the electron beam 104 from electric fields of an energy analyzer 118 and a detector 121, and the energy analyzer 118 and the detector 121 are located in contact with an electron beam aperture 115 and the shield electrode 117.

REFERENCES:
patent: 4442355 (1984-04-01), Tamura et al.
patent: 5182454 (1993-01-01), Matsuda et al.
patent: 5412210 (1995-05-01), Todokoro et al.
patent: 5424541 (1995-06-01), Todokoro et al.
patent: 5608218 (1997-03-01), Sato et al.
patent: 5894124 (1999-04-01), Iwabuchi et al.

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