Scanning electron microscope

Details Scanning electron microscope Scanning electron microscope

1988-03-17

1989-02-07

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250307, 2504421, 364559, 364170, 36457104, H01J 3720

Patent

active

048033588

ABSTRACT:
A scanning electron microscope for scanning the surface of a specimen with an electron beam to detect secondary electrons, backscattered electrons, or X-rays emitted from the specimen, thereby forming an image of the surface of the specimen, is provided with a specimen table capable of making a horizontal movement, a vertical movement a rotating operation and a tilting operation, an arithmetic unit for converting the output of a detector for detecting the secondary electrons, backscattered electrons or X-ray into a digital signal to store the digital signal, and for calculating the amount of each of the horizontal movement, vertical movement, rotating operation and tilting operation of the specimen table, on the basis of the stored information, an indication given from the outside, and others, and a controller for controlling the specimen table on the basis of a calculated value from the arithmetic unit.

REFERENCES:
patent: 3971936 (1976-07-01), Hoppe
patent: 4627009 (1986-12-01), Holmes et al.
Via, IBM Technical Disclosure Bulletin, vol. 26, No. 3A, Aug. 1983, pp. 1173-1174.

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