Scanning electron microscope

Details Scanning electron microscope Scanning electron microscope

1991-09-06

1992-09-22

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250397, H01J 3728, H01J 37244

Patent

active

051499681

ABSTRACT:
This invention relates to a scanning electron microscope for detecting secondary electrons from above an objective lens and obtaining an observation image, wherein a shield electrode is disposed for shielding an electric field on an optical axis in order to prevent a primary electron beam from being bent by the electric field generated by a secondary electron detector, a mechanism is provided so as to move the shield electrode to a first position at which the shield electrode shields the electric field on the optical axis and to a second position at which a secondary electron can be collected sufficiently by the electric field, and the shield electrode is moved to the first position during observation by a low acceleration voltage and to a second position during observation by a high acceleration voltage.

REFERENCES:
patent: 4442355 (1984-04-01), Tamura et al.
patent: 4893009 (1990-01-01), Kuroda
patent: 4896036 (1990-01-01), Rose et al.

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