Scanning electron microscope

Details Scanning electron microscope Scanning electron microscope

1988-04-13

1989-04-04

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250397, H01J 37256, H01J 37244

Patent

active

048188743

ABSTRACT:
There is disclosed an electron microscope comprising a stage assembly for tilting, translating, or rotating the specimen, a first and a second detector disposed on opposite sides of the optical axis of the beam to detect secondary electrons produced in response to the incidence of the beam. The first detector is disposed relatively close to the optical axis. The second detector is located relatively remotely from the optical axis to prevent the state assembly from colliding against the detector when the assembly is tilted. The gains of the amplifiers to which the outputs of the first and second detectors are applied are made different to compensate for the imbalance between the intensities of the output signals from the detectors.

REFERENCES:
patent: 4426577 (1984-01-01), Kokie et al.
patent: 4437009 (1984-03-01), Yamazaki

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