Scanning electron microscope

Details Scanning electron microscope Scanning electron microscope

1989-09-28

1991-02-05

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250397, H01J 37256, H01J 3728

Patent

active

049907786

ABSTRACT:
In a field emission gun, current intensity of the electron beam passing through the gun anode contains a fluctuation component due to the ion bombardment and ion absorption near the emitter tip. For this reason, a scanning electron microscope having a field emission gun usually incorporates a fluctuation compensation device, which generates the signal ratio of the secondary electron signal from a specimen irradiated by the electron beam and the monitor signal corresponding to the current intensity of the electron beam passing through the gun anode and supplies the signal ratio for brightness modulation signal to the scanning image display means of the microscope. However, if the electron beam intensity is varied in a very wide operating range, the conventional fluctuation compensation device cannot operate with enough compensation effect. In this invention, the signal level of the monitor signal is maintained constant, so that the fluctuation correction device operates with enough compensation effect for a wide operating range of electron beam intensity.

REFERENCES:
patent: 3783281 (1974-01-01), Crewe
patent: 4588891 (1986-05-01), Saito

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