Scanning electron device

Details Scanning electron device Scanning electron device

1976-04-21

1977-04-26

Smith, Alfred E.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

178DIG21, H01J 3726

Patent

active

040203433

ABSTRACT:
A scanning electron microscope or other type of scanning electron device incorporating a light pen for automatically changing the field of view of a specimen on a CRT. The output of said light pen controls the center and/or width of the scanning area of the incident electron beam irradiating the specimen when said light pen is directed towards a certain point in the initial specimen field of view on the CRT, thereby displaying said point at the center of the changed field of view on the CRT.

REFERENCES:
patent: 3795808 (1974-03-01), Drayton et al.
patent: 3953669 (1976-04-01), Saccomani et al.

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