Scanning electron device

Details Scanning electron device Scanning electron device

1976-12-15

1978-01-31

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250397, H01J 3726

Patent

active

040717593

ABSTRACT:
A scanning electron microscope for displaying a scanning image on a cathode ray tube screen. A high magnification image is displayed within a low magnification image displayed on a cathode ray tube screen so that the relative positions of the low and high magnification images can be immediately observed. The magnification and the display area of the high magnification image is varied continuously.

REFERENCES:
patent: 3502870 (1970-03-01), Fujiyasu et al.
patent: 3614311 (1971-10-01), Fujiyasu et al.
patent: 3795808 (1974-03-01), Drayton et al.
patent: 3835246 (1974-09-01), Muller et al.
patent: 4020343 (1977-04-01), Shimaya et al.

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